粒子计数器 LASA110II
产品简介
Lasa110II型是**款1.0 CFM流量的激光二极管粒子计数器,能够监测0.1µm粒子。这款计数器的功能非常**,监测精准度极高,性能稳定,使用成本低,使用寿命长,并带有3年的激光部件保修。
产品详细信息
LASA110II型 粒子计数器特点:
降低缺陷率
实时监测导致制程缺陷的粒子变化
使用移动式计数器定位粒子污染源
排除多管采样的常见漏计错误
附件配备齐全,适用于多种应用
0.1µm粒子监测效率高于传统设备
提高生产效率
存储/导出采样方案,节省洁净室认证时间
通过办公室电脑和网络浏览器控制洁净室监测:设置、采样、显示、打印、下载数据、上传采样方案等
噪音极小,有利于改善工作环境
符合ISO、FS或英国标准的计算统计和报告
同Facility Net软件整合,用于**数据管理
高速下载数据至Excel、PDA或USB存储器
成本低
使用同一台粒子计数器进行ISO Class 1 - 9应用
无需频繁清洗激光部件
泵的使用寿命长,无需每年更换叶片
容易清洗擦拭,设计有利于将粒子截留减至*少
符合ESA/ESD标准的KYDEX®机壳,非常结实,抗化学腐蚀。
低温激光二级管使用寿命更长;激光部件保修3年
LASA110II型 粒子计数器应用:
洁净室监测,高灵敏度应用
满足ISO、FS或英国标准的设施认证
微环境认证,故障诊断/移动式应用
多管采样(使用AM II型多点采样设备)
监测高压气体(使用高压扩散器)
超洁净区监测(ISO 1-2)
LASA110II型粒子计数器技术指标:
Channel thresholds: |
0.1, 0.2, 0.3, 0.5, 1.0, and 5.0 μm |
Flow rate: |
1 C*****8.3 LPM); monitored and adjusted electronically |
Calibration: |
Materials traceable to US National Institute for Standards and Technology (NIST) |
Test methodology: |
0.1 μm particles verified by Differential Mobility Analysis; larger sizes verified by transmission electron microscopy |
Maximum concentration: |
@ 5% coincidence loss: > 500,000/ft3 (optional diluter required for ISO Class 8+); automatic over-coincidence alarm |
Zero count level: |
Exceeds JIS standards, allowing use in ISO class 1 and 2 rooms |
Laser source: |
Laser diode, 3W (de-rated to 2W), 810 nm, infrared |
Laser cooling: |
Thermoelectric chilling (Peltier cooler), heat sink, dedicated 5 CFM cooling fan |
Warranty: |
Three year warranty on laser module, two years on other components |
Communication modes: |
Ethernet or RS-232; optional 4-20 mA output board; optional USB output |
Environmental sensors: |
Optional Temp/RH probe; integrates up to 4 external sensors via 4-20 mA input |
Display: |
1/4 VGA color LCD screen |
Display languages: |
English, French, German, Italian, Japanese (Kanji), Korean, Spanish, Mandarin (classical or simplified) |
Printer: |
Built-in thermal printer |
Reports: |
Sample print strips; final reports for ISO/FS209/British Standards cleanroom qualification; averages
of multiple runs; print-on-alarm; sampling configuration printouts |
Remote operation: |
Use web browser to operate unit; save or load recipes |
Key software features: |
Recipes, scheduled sampling, historical data filtering, sorting and review, password protection |
Data storage: |
3,000 data sets (includes particle and environmental data, plus location, time, etc.) |
Data and sampling security: |
Stored data records cannot be altered; sampling recipes can be password protected |
External surface: |
KYDEX chassis, polyester display screen, and zinc-plated steel bottom are all ESA/ESD compliant |
Cleaning materials: |
Bleach, formaldehyde, ethyl/isopropyl alcohol, peroxide/quaternary ammonium solutions |
Monitor cleanliness: |
Internally filters both pump exhaust (99.99+% @ 0.1 μm) and cabinet exhaust (95.0% @ 0.3 μm) |
Dimensions (l, w, h);
weight: |
18 x 14 x 13 in. ( 45 x 35 x 32 cm);
37 lb. (17 kg) |
Power: |
85-264 V, 50-60 Hz; optional external battery/charger |
Operating environment: |
Temperature: 15 - 30°C; Humidity: 10 - 85% non-condensing |