粒子计数器 LASA110II

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公司名称:仪器信息港
  地:上海宝山
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产品简介

Lasa110II型是**款1.0 CFM流量的激光二极管粒子计数器,能够监测0.1µm粒子。这款计数器的功能非常**,监测精准度极高,性能稳定,使用成本低,使用寿命长,并带有3年的激光部件保修。

产品详细信息

LASA110II 粒子计数器特点:

*          降低缺陷率

*          实时监测导致制程缺陷的粒子变化

*          使用移动式计数器定位粒子污染源

*          排除多管采样的常见漏计错误

*          附件配备齐全,适用于多种应用

*          0.1µm粒子监测效率高于传统设备

*          提高生产效率

*          存储/导出采样方案,节省洁净室认证时间

*          通过办公室电脑和网络浏览器控制洁净室监测:设置、采样、显示、打印、下载数据、上传采样方案等

*          噪音极小,有利于改善工作环境

*          可选择9种语言显示和打印

*          符合ISOFS或英国标准的计算统计和报告

*          Facility Net软件整合,用于**数据管理

*          高速下载数据至ExcelPDAUSB存储器

*          成本低

*          使用同一台粒子计数器进行ISO Class 1 - 9应用

*          无需频繁清洗激光部件

*          泵的使用寿命长,无需每年更换叶片

*          容易清洗擦拭,设计有利于将粒子截留减至*少

*          符合ESA/ESD标准的KYDEX®机壳,非常结实,抗化学腐蚀。

*          低温激光二级管使用寿命更长;激光部件保修3

LASA110II 粒子计数器应用:

*          洁净室监测,高灵敏度应用

*          满足ISOFS或英国标准的设施认证

*          微环境认证,故障诊断/移动式应用

*          多管采样(使用AM II型多点采样设备)

*          监测高压气体(使用高压扩散器)

*          超洁净区监测(ISO 1-2

LASA110II粒子计数器技术指标

Channel thresholds:

0.1, 0.2, 0.3, 0.5, 1.0, and 5.0 μm

Flow rate:

1 C*****8.3 LPM); monitored and adjusted electronically

Calibration:

Materials traceable to US National Institute for Standards and Technology (NIST)

Test methodology:

0.1 μm particles verified by Differential Mobility Analysis; larger sizes verified by transmission electron microscopy

Maximum concentration:

@ 5% coincidence loss: > 500,000/ft3 (optional diluter required for ISO Class 8+); automatic over-coincidence alarm

Zero count level:

Exceeds JIS standards, allowing use in ISO class 1 and 2 rooms

Laser source:

Laser diode, 3W (de-rated to 2W), 810 nm, infrared

Laser cooling:

Thermoelectric chilling (Peltier cooler), heat sink, dedicated 5 CFM cooling fan

Warranty:

Three year warranty on laser module, two years on other components

Communication modes:

Ethernet or RS-232; optional 4-20 mA output board; optional USB output

Environmental sensors:

Optional Temp/RH probe; integrates up to 4 external sensors via 4-20 mA input

Display:

1/4 VGA color LCD screen

Display languages:

English, French, German, Italian, Japanese (Kanji), Korean, Spanish, Mandarin (classical or simplified)

Printer:

Built-in thermal printer

Reports:

Sample print strips; final reports for ISO/FS209/British Standards cleanroom qualification; averages

of multiple runs; print-on-alarm; sampling configuration printouts

Remote operation:

Use web browser to operate unit; save or load recipes

Key software features:

Recipes, scheduled sampling, historical data filtering, sorting and review, password protection

Data storage:

3,000 data sets (includes particle and environmental data, plus location, time, etc.)

Data and sampling security:

Stored data records cannot be altered; sampling recipes can be password protected

External surface:

KYDEX chassis, polyester display screen, and zinc-plated steel bottom are all ESA/ESD compliant

Cleaning materials:

Bleach, formaldehyde, ethyl/isopropyl alcohol, peroxide/quaternary ammonium solutions

Monitor cleanliness:

Internally filters both pump exhaust (99.99+% @ 0.1 μm) and cabinet exhaust (95.0% @ 0.3 μm)

Dimensions (l, w, h);

weight:

18 x 14 x 13 in. ( 45 x 35 x 32 cm);

37 lb. (17 kg)

Power:

85-264 V, 50-60 Hz; optional external battery/charger

Operating environment:

Temperature: 15 - 30°C; Humidity: 10 - 85% non-condensing

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