九通道混气高真空CVD系统 GSL-1700X-80-HVC9

• Double layer steel casing with air cooling. 
• Two cooling fans inside to keep  case temperature < 55oC.
• 内炉膛表面涂有美国进口的高温氧化铝涂层可以提高设备的加热效率，同时也可以延长炉膛的使用寿命
• High purity Alumina refractory chamber
• Vacuum and gas mixing system is located in bottom Mobile cart with 4 wheel.
• Vacuum flange, gauge, valves, pipe and high vacuum pump are included for immediate use.

 6 Kw

Voltage

 AC 208-240V Single Phase, 50/60 Hz

Max. Temperature

 1700 oC (< 1 hours )

Continuous Temperature

 1600 oC

 Max. Heating Rate

 <= 5  oC /min

 Tube Size and Materials

• Premier Grade alumina tube made in USA.

• ID: 82 mm x OD: 73 mm x 1000 mm length.  

• Two pairs of SS tune support is installed to avoid tube bending under high temperature (click picture below to see details).

 Heating Zone

• Heating zone length: 457 mm (18")

• Constant Temperature Zone length: 150 mm (6")(+/-1oC)

• One precision digital temperature controller programmable with 50 segments.

• PID adjustable with auto tune function to ensure temperature stability within  +/- 1 oC.     控温仪表操作视频

• Full protection in each controller for over-temperature and broken thermal couple.

Thermal Couple

   B type thermal couples built in

• Two stainless steel flanges with vacuum hose and gas fitting pipe. One flange is installed with KFD-40 adaptor and ball valve.
• Double high temperature silicone O-ring for using under 300oC.
• Porous alumina blocks included for protecting flange from heat radiation.

Vacuum pumps

Tow stages vacuum pump installed in bottom case:

• OneDouble Steps Rotary Vane High Speed Mechanical Vacuum Pump- T2XZ-4C110with max. vacuum pressure of 10-2 torr.  

• One turbo molecular pump with max. vacuum pressure of 2x10-5 torr.

• One precision vacuum sensor installed. 

• Stainless steel hose tube is included for connecting to tube furnace.

• Digital vacuum meter / controller installed.

Vacuum Sensor & display

• Vacuum sensor is installed to vacuum flange on tube furnace, and connect to a digital vacuum pressure display.

• Vacuum controller and display areinstalled in bottom mobile cart.

• 9 precision mass flow meters (CS200) controllers are installed in bottom mobile cart with digital display panel of+/-1% of Full Scale (accuracy is within 35%-100% of full scale)
  • 3 MFC at range 0 - 1000scc
  • 3 MFC at range 0 - 200scc
  • 3 MFC at range 0 - 10 scc
  • one floating meter will be installed for N2 gas only
• one mechanical pressure meters are installed in bottom mobile cart for monitor each gas 's pressure in mixer.
• 9mass flow MFC control panels/displays with dial button to adjust gas flow rate. Please see picture below.

 

 

• SS 316 1/4" pipe/fitting
• SS 316 vacuum needle valves
• 21 sets of stainless steel vacuum valves are installed outside of  right side panel of mobile cabinet to control, vacuum pump, flowing gases and two inlet gases separately.
• Please click here to see sketch of pipe connection.

 Dimension

 Furnace: 550 x 380 x 520  Bottom Mobile case: 600x600x597

 Net Weight

 about 100 kg

Shipping weight

 200 Lbs 

Shipping package size after crating

 Two cases in one plastic pallet: 45x45x35/case

 Warranty & certificate

• One year limited warranty (Consumable parts such as processing tubes, o-rings and heating elements are not covered by the warranty, please order the replacement at related products below.)
•  CE Certificate