FHR.Micro系列PVD溅射台磁控溅射 单源
产品简介
实验室规模真空工艺设备用于研发和教学- 多领域应用(镀膜,退火,刻蚀...)
产品详细信息
laboratory-scale vacuum process systems for R&D and education
实验室规模真空工艺设备用于研发和教学
- many application fields (coating, annealing, etching,..)
in:
- 多领域应用(镀膜,退火,刻蚀...)
• Semiconductor
• 半导体
• Sensor
• 传感器
• MEMS
• 微型机电系统
• Optics
• 光学
• PV
• 光伏
• Automotive
• 自动化
- low invest costs
- 低投资
- low running costs
- 低运营成本
- compact design
- **的设计
- easy operability
- 便于操作
- easy service and great accessibility of all components
- 所有部件便于维护和维修
FHR.Micro.200-MonoPVD
classic version
经典版
[single source sputter tool]
单源溅射设备
- small size and compact design
- 简洁小巧的设计
- aluminum process chamber
- 铝制工艺腔室
- fix substrate holder for substrates up to ø200mm
- 固定的基片托可用于*大ø200mm基片
- static sputter process at room temperature in DC-
power mode
- DC电源模式室温下静止溅射过程
- source target diameter 200mm
- 源靶材直径200mm
- manually operation
- 手动操作
options
可选配置
- sputter process in RF-power mode
- RF-电源模式溅射工艺
- substrate stage heater
- 基片阶段加热器
coating materials
镀膜材料
- conductive materials, for example Cr, Cu, Au, Ag,….
- 导电材料,如: Cr, Cu, Au, Ag,…
- for RF-power mode: Al2O3, SiO2,…..
- RF-电源模式: Al2O3, SiO2,…..
实验室规模真空工艺设备用于研发和教学
- many application fields (coating, annealing, etching,..)
in:
- 多领域应用(镀膜,退火,刻蚀...)
• Semiconductor
• 半导体
• Sensor
• 传感器
• MEMS
• 微型机电系统
• Optics
• 光学
• PV
• 光伏
• Automotive
• 自动化
- low invest costs
- 低投资
- low running costs
- 低运营成本
- compact design
- **的设计
- easy operability
- 便于操作
- easy service and great accessibility of all components
- 所有部件便于维护和维修
FHR.Micro.200-MonoPVD
classic version
经典版
[single source sputter tool]
单源溅射设备
- small size and compact design
- 简洁小巧的设计
- aluminum process chamber
- 铝制工艺腔室
- fix substrate holder for substrates up to ø200mm
- 固定的基片托可用于*大ø200mm基片
- static sputter process at room temperature in DC-
power mode
- DC电源模式室温下静止溅射过程
- source target diameter 200mm
- 源靶材直径200mm
- manually operation
- 手动操作
options
可选配置
- sputter process in RF-power mode
- RF-电源模式溅射工艺
- substrate stage heater
- 基片阶段加热器
coating materials
镀膜材料
- conductive materials, for example Cr, Cu, Au, Ag,….
- 导电材料,如: Cr, Cu, Au, Ag,…
- for RF-power mode: Al2O3, SiO2,…..
- RF-电源模式: Al2O3, SiO2,…..