产品详情
简单介绍：
BRONKHORST质量流量控制器
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详情介绍：
BRONKHORST质量流量控制器
产品特点：
量程*小0-1mL/min；*大0-1250L/min
*大压力可达400BAR
**的3F校准
无可移动部件
快速响应时间
模块化设计
低压降
全金属表面抛光处理
ACCURACY
(ATCALIBRATIONUNDEROPERATINGCONDITIONS)
Standard 3F-Calibration: ±0.8% of reading plus ±0.2% of full scale
Polynomial calibration: ±0.5% of reading plus ±0.1% of full scale
REPRODUCIBILITY
< 0.1% full scale
REPEATABILITY
< 0.2% of reading
RESPONSETIME
1...2 sec. (faster on request)
CONTROL STABILITY
< ±0.1% full scale (typical for 1 ln/min N2)
PRESSURE SENSITIVITY
0.1%/bar typ. N2
0.01%/bar typ. H2
ATTITUDE SENSITIVITY
max. error 0.015% at 1 bar N2and 90°change
VIBRATION SENSITIVITY
negligible
TEMPERATURE SENSITIVITY
zero point approx. 0.05% of full scale/°C
SUPPLY VOLTAGE SENSITIVITY
zero at correct supply voltages (acc. to electr. data)
CONTROLVALVE
closes automatically at setpoint < 1%
LEAKINTEGRITY
tested < 2 x 10-9mbar l/s He
RF
CE approved design
MECHANICALPARTS
PROCESSCONNECTIONS
see model number code; other on application
MATERIAL SOFCONSTRUCTION
stainless steel AISI 316L or comparable
SEALS
Viton, EPDM, elast. PTFE, other on application
SURFACE QUALITY
Ra 0.2...0.6 µm
OPERATING LIMITS
RANGE
2%...100%
TYPESOFGASES
all gases compatible with AISI 316L
TEMPERATURE
-10 °C up to +70 °C
WARMING-UPTIME
30 min. for optimum accuracy,
2 min. for accuracy ±2% of full scale
ELECTRICAL PROPERTIES
SUPPLY VOLTAGE
mass flow meter +15 V...24 V, 50 mA
mass flow controller +15 V, 250 mA -15 V, 30 mA
mass flow controller +24 V, 190 mA
OUTPUT SIGNAL
0...5 V, 0...10 V, 4…20mA
SETPOINT SIGNAL
0...5 V, 0...10 V, 4…20mA
ELECTRICAL CONNECTION
9-pin sub-D connector, cable length independent
BRONKHORST质量流量控制器
量程*小0-1mL/min；*大0-1250L/min
*大压力可达400BAR
**的3F校准
无可移动部件
快速响应时间
模块化设计
低压降
全金属表面抛光处理
ACCURACY
(ATCALIBRATIONUNDEROPERATINGCONDITIONS)
Standard 3F-Calibration: ±0.8% of reading plus ±0.2% of full scale
Polynomial calibration: ±0.5% of reading plus ±0.1% of full scale
REPRODUCIBILITY
< 0.1% full scale
REPEATABILITY
< 0.2% of reading
RESPONSETIME
1...2 sec. (faster on request)
CONTROL STABILITY
< ±0.1% full scale (typical for 1 ln/min N2)
PRESSURE SENSITIVITY
0.1%/bar typ. N2
0.01%/bar typ. H2
ATTITUDE SENSITIVITY
max. error 0.015% at 1 bar N2and 90°change
VIBRATION SENSITIVITY
negligible
TEMPERATURE SENSITIVITY
zero point approx. 0.05% of full scale/°C
SUPPLY VOLTAGE SENSITIVITY
zero at correct supply voltages (acc. to electr. data)
CONTROLVALVE
closes automatically at setpoint < 1%
LEAKINTEGRITY
tested < 2 x 10-9mbar l/s He
RF
CE approved design
MECHANICALPARTS
PROCESSCONNECTIONS
see model number code; other on application
MATERIAL SOFCONSTRUCTION
stainless steel AISI 316L or comparable
SEALS
Viton, EPDM, elast. PTFE, other on application
SURFACE QUALITY
Ra 0.2...0.6 µm
OPERATING LIMITS
RANGE
2%...100%
TYPESOFGASES
all gases compatible with AISI 316L
TEMPERATURE
-10 °C up to +70 °C
WARMING-UPTIME
30 min. for optimum accuracy,
2 min. for accuracy ±2% of full scale
ELECTRICAL PROPERTIES
SUPPLY VOLTAGE
mass flow meter +15 V...24 V, 50 mA
mass flow controller +15 V, 250 mA -15 V, 30 mA
mass flow controller +24 V, 190 mA
OUTPUT SIGNAL
0...5 V, 0...10 V, 4…20mA
SETPOINT SIGNAL
0...5 V, 0...10 V, 4…20mA
ELECTRICAL CONNECTION
9-pin sub-D connector, cable length independent
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