SCROLLVAC 干式压缩真空泵是按照涡旋式压缩机的工作原理运行。每台泵由2个阿基米德螺旋件构成，旋转运行时通过减小凹槽的容积，将气体从外向内压缩产生真空。 SCROLLVAC涡旋泵无油运行，在整个工作范围内抽速稳定。
Scroll Pumps
In 1905 the principle of the scroll compressor was developed by the Frenchman Leon Creux. Starting only a few years ago, the scroll pump is now being used as an oil-free vacuum pump. Every scroll pump consists of two or more Archimedes spirals engaging each other with an offset of 180°. Thus several crescent-shaped pockets of differing sizes are created. By means of an eccentric, a second spiral is made to orbit about a fixed spiral, thus reducing the volume of the pockets and compressing gases from the outside towards the inside thereby pumping the gases. Important to the quality of a scroll pump is that precise manufacturing tolerances are maintained and that suitable materials are selected.
The dry compressing SC-D scroll pumps excel through the following:
■ Absolutely oil-free ■ Low base vacuum ■ High effective pumping speed ■ Low ultimate pressure ■ Low noise level ■ Low vibration operation ■ Maximum inlet pressure ■ Low weight ■ Air cooling ■ Low power consumption
Oil-free scroll vacuum pumps well-suited for use in all applications which require a dry and clean vacuum:
■ Electron beam welding ■ Lasers ■ Leak detection systems ■ Accelerators / synchrotrons ■ Surface analysis instruments ■ Scanning electron microscopes ■ Load lock / transfer chambers ■ Spectroscopy ■ Lamps manufacture ■ As a backing pump for turbomolecular pumps