金属球纳米级微位移测量电路的分析

转子位移检测环节是静电悬浮轴承的重要组成部分，位移测量电路的性能直接影响到转子在电极球腔中的定中精度。介绍了一种高精度转子位移测量电路的工作原理，分析了各个环节的特性。测试结果表明，电路性能与理论分析结果吻合较好，位移测量电路的分辨率、灵敏度、线性测量范围、零位稳定度及通频带等指标可以满足高精度静电悬浮轴承的要求。  Analysis of Micro-displacement Measuring Circuitfor Metal Sphere with Nanometer Resolution

Han Fengtian Gao Zhongyu Zhao Shaojun
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Tsinghua University, Beijing 100084

Abstract： Rotor displacement detecting is an important part of an active electrostatic bearing, and the centering accuracy of rotor levitated in spherical electrodes is directly determined by the performance of the displacement detecting circuit. In this paper, a high-accuracy rotor displacement measuring circuit, including its operating principle and characteristics is presented. Experimental results are given to confirm the analyses. The operational performance of rotor displacement measuring circuit, i.e., resolution, sensitivity, linear detecting range, zero drift, and frequency characteristics, can satisfy the requirements of high-precision electrostatic bearing.

Key Words： Micro displacement Measuring，Capacitance Bridge，Electrostatic Bearing
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