开发了一种基于MEMS技术制作的三维微力传感器,传感器为完全对称结构,由4根垂直放置和1根悬臂放置的硅梁连接而成｡每根硅梁上设计了一个利用MEMS工艺制作的惠斯通电桥,该种电桥应变系数大,在很大程度上简化了电桥处理电路的设计｡在弹性力学和材料力学基础上,利用SOLIDWORK软件对传感器进行了应变分析,得出了力和输出电压之间的关系｡设计了传感器信号检测电路,确定了减小温度对检测精度影响的方法｡测试表明:该传感器检测量程为±0.5 N,重复定位精度优于9.1 mN,分辨力优于0.95 mN. Three-dimensional Micro Force Sensor Based on MEMS Technology QIN Lei,LI Man-tian,SUN Li-ning (Robotics Institute,Harbin Institute of Technology,Harbin 150001 China) Abstract:A novel three-dimensional micro force sensor based on MEMS technology was developed in symmetry of structure.The sensor is composed of five silicon beams.4 beams are placed along with vertical direction and the last beam is cantilever.Each silicon beam has a Wheatstone bridge made basing on MEMS technology.The strain coefficient of this kind of bridge is very large,so the corresponding processing circuit is very simple.Based on the knowledge of mechanics of elasticity and material and applied the SOLIDWORK software,the corresponding relationship between force and output voltage was derived from strain analysis.The application circuit was designed and the method that could reduce the influence of temperature was found out.It is improved that the range ability of the sensor is up to ±0.5N,the precision is 9.1 mN and the resolution is 0.95 mN. Key words:micro force sensor;MEMS;micro strain