EUV光源
EQ-10HR是满足高量产EUV光刻的光源，工作频率为10kHz。无电极z箍缩通过感应耦合连接电流与放电等离子体，使得等离子体更加稳定可控。等离子体与光源成分分隔开，减少了碎片，并保证了长的工作寿命。它可以整合到工艺设备中，可以以10 kHz的脉冲循环率连续工作上十亿次。
EQ-10HR Series Electrodeless Z-Pinch??
High Repetition Rate 10 kHz EUV Source
Features & Benefits
?? Unique patented electrodeless Z-Pinch technology
--- Low debris / low consumable cost
?? 10 kHz pulse rate
--- Enables high volume manufacturing (HVM) simulation
--- Continuous mode, 24/7
?? Small plasma size
--- Below 1mm diameter
?? Cost-effective and compact
--- Small footprint
?? CE-Mark and SEMI S2-0703 compliant
Applications
?? Accelerated EUV Optics Testing
?? EUV Metrology
?? EUV Resist Development
?? Defect Inspection
?? EUV Microscopy
EUV sources for HVM are expected to operate at pulse repetition rates of 10 kHz or higher. To simulate the effects of operating at such pulse rates on the optics lifetime, for example, high repetition rate metrology sources are needed.
The Energetiq EQ-10HR EUV Source is a compact, easy-to-use, reliable, and cost-effective EUV light source, based on Energetiq\'s proven Electrodeless Z-pinch?? technology using Xenon gas. The EQ- 10HR high repetition rate EUV source is uniquely suited for metrology and research applications where simulation of HVM is required.
The EQ-10HR is a stand-alone system, ready to be integrated into a process tool. The system includes the electrodeless Z-pinch source assembly, Maglev vacuum pumping subsystem, gas delivery subsystem, power delivery subsystem, & control electronics. The EQ-10HR is capable of delivering up to 0.5 mJ/pulse of broadband EUV into 2pi steradians, & will run continuously at pulse repetition rates of up 10 kHz.
To accommodate the differing requirements of the various applications, the source operating conditions are user-adjustable. The EUV light output can be optimized for peak power or for peak brightness as required by the user. Plasma size is typically below 1mm in diameter under typical operating conditions. A simple and flexible optical interface is provided to the user on the side of the system enclosure to connect to the application equipment. Custom interfaces are available to meet specific customer requirements. The user interface operates by a color touch screen display, and incorporates menus allowing manual and automatic operation.
The EQ-10HR is easy to install, requiring only electrical power, a chilled water supply, clean dry compressed air and a supply of Xenon.
EQ-10SX Series Electrodeless Z-Pinch??
Soft X-Ray (SXR) Source
Features & Benefits
?? Unique Patented electrodeless design
--- Low debris / low consumable cost
?? 2-4nm Soft X-Rays produced using Nitrogen
--- Enables tabletop SXR microscope applications
?? Small plasma size
--- <1mm diameter for high brightness
?? Cost–effective and compact
--- Low cost per SXR watt
--- Small footprint
Applications
?? Water-Window Microscopy
?? Microbeam Probing of Cells
Soft x-rays (SXR) for water-window microscopy and other applications have not readily been available outside synchrotron facilities. Now, soft x-rays can be produced in any research laboratory at flux levels suitable for imaging and microprobing, thanks to a new lab-scale source from Energetiq.
The Energetiq EQ-10SXR is a compact, easy-to-use, reliable and cost-effective SXR light source system, based on Energetiq’s unique Electrodeless Z-pinch?? technology using Nitrogen gas.
The Energetiq EQ-10SXR source comprises a 19" rack containing the gas subsystems, power delivery subsystem, and control electronics; the electrodeless Z-pinch source assembly with its integrated vacuum pumping; and a high efficiency pulse modulator. This modular design allows easy integration to the microscope or other applications
equipment.
The EQ-10SXR is capable of delivering up to 400 milliwatts of 2.8nm
power into 2pi steradians and will run continuously at pulse repetition rates of
up to 2kHz.
To accommodate the differing requirements of the various applications, the source operating conditions are user-adjustable. The light output can be optimized for peak power or for peak brightness as required by the user. Plasma size is typically below 1mm in diameter under typical operating conditions.
A simple and flexible optical interface is provided to the user on the front face of the electrodeless SXR source assembly to connect to the application equipment. Custom interfaces are available to meet specific customer requirements.
The user interface operates by a color touch screen display, and incorporates menus allowing manual and automatic operation.
The EQ-10SXR is easy to install, requiring only electrical power, a chilled water supply, clean dry compressed air and a supply of high purity Nitrogen.
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