OMT-GX62半导体芯片晶圆检查测量显微镜
工业显微镜广泛应用于半导体,电子工业进行晶体,集成电路的检验和科学研究.
配备有反射照明,成象和观察系统,偏光装置.
Industrial microscope is widely used for crystal, integrated circuit (IC) examination
and research. It is supplied with reflected illumination, imaging and viewing system,
polarized imaging system.
规格 Specifications
◇ 无限远光学系统,管镜焦距200mm
Infinitive Optical System, Tube Lens Focal Length 200mm
◇ 铰链式三目镜筒,30°倾斜, 瞳距55-75mm
Compensation Free Trinocular Tube, Inclined at 30°, Interpupillary Distance 55-75mm
◇ 高眼点,大视场目镜WF10X/22
High Point and Wide Field Eyepiece WF10/22
◇ 长工作距离,平场复消色差物镜2X/0.055, 5X/0.14, 10X/0.28, 20X/0.29, 50X/0.42
Long Working Distance, Plan Apo Objectives 2X/0.055, 5X/0.14, 10X/0.28, 20X/0.29, 50X/0.42
◇ 五孔物镜转换器
Quintuple Nosepiece
◇ 6″双层活动平台和圆平台
6″Double Layers Mechanical Stage and circle stage
◇ 同轴粗微调焦机构,微动格值0.002mm
Coaxial Coarse & Fin Focus Adjustment System, Fine Division 0.002mm
◇照明系统 Illumination System
冷光源光纤反射照明器:12V150W
Cold Light Fiber Reflected Illnminator: 12V150W
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