BIRD(鸟牌)4421功率计 Precision Power Meter for Semiconductor Processing Applications • ±1% Accuracy - Accomplished through the use of sensors with an automatic frequency compensation scheme, where the error contributions due to directional coupler frequency response characteristics are eliminated. • Wide Dynamic Range - The instrument will meet the full accuracy specification over a 35 dB dynamic range. • Excellent Measurement Repeatability - Typically <0.1% • Digital Display - Along with automatic VSWR calculation • Computer Interface - RS-232 and IEEE-488 standard The Bird® Model 4421 is a precision RF power meter that, while originally intended for general purpose laboratory applications where high accuracy is required, has found wide acceptance in semiconductor processing applications. The product is configured as a system, consisting of the Model 4421 digital display and a precision power sensor selected for the application based upon maximum power and operating frequency.
MODEL 4421 MULTIFUNCTION POWER METER Power Range: 100 mW to 25 kW FS Frequency Range : 100 kHz - 1 GHz VSWR Range: 1.0 - 199.9 Functions : Forward and reflected power in W or dBm, VSWR, return loss in dB and min./max. values Overrange : Audible warning when RF power input exceeds 120% of sensor's maximum power range Indication Display: 3 1/2 digit-liquid crystal display with indicator for mode, measurement units, battery condition, programming status, and trend arrows. Switchable backlight. Operating Power : 115/230 VAC, 50/60 Hz or 8 nickel metal hydride 1.2 V cells (NEDA type 10014) Nominal Size : 12 9/32" L x 12 5/32" W x 4 1/4" H (312 mm x 309 mm x 108 mm) with handle extended 15 7/16" L (392 mm) Weight : 11 lbs. (5 kg.) Interconnects: 1 meter latch-n-lock coiled cable Interfaces: IEEE-488 and RS-232 standard Dimensions : 4 1/2" x 6 1/2" (114 x 165 mm) Required Product: RF Power Sensor Accessories: Case 4300A215 (page 43) 19” Panel Mount Kit 4421-250 Latch & Lock Case 4421-038
4020 SERIES — Power Sensor
4020 系列功率传感器
Model(型号)
Frequency Range(频率范围)
Power Input(功率范围)
4021
1.8-32 MHz
300 mW to 1 kW (1.2 kW max.)
4022
25-1000 MHz
4024
1.5-32 MHz
3 W to 10 kW (12 kW max.)
4025
100-2500 kHz
4027A 系列功率传感器
4027A250K
250-400 kHz
3 W to 10 kW
4027A400K
400-550 kHz
4027A800K
800-950 kHz
4027A2M
1.5-2.5 MHz
4027A4M
3-5 MHz
4027A10M
10-15 MHz
4027A12M
300 mW to 1kW
4027A25M
25-30 MHz
3 W to 9 kW
4027A35M
35-45 MHz
3 W to 7.5 kW
4027A60M
45-65 MHz
3 W to 6 kW
4027A100M
95-105 MHz
3 W to 4 kW
4027A150M
150-170 MHz
3.75 W to 3.75 kW
4027F 系列过滤型传感器
4027F2M
1.8-2.2 MHz
100 W to 10 kW
4027F10M
12-15 MHz