E5260A 半导体器件主要特性与技术指标 General Features Perform precision dc parametric measurements Eight slots for plug-in modules Code compatible with 4142B Measurement Capabilities 0.5 microvolt and 0.1 femtoamp measurement resolution (HRSMU + ASU) +/- 100 Volts and +/- 100 milliamp output capability (MPSMU, HRSMU) +/- 200 Volts and +/- 1 Amp output capability (HPSMU) 4 Amp ground unit
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