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- 产品名称:VTC-200 Programmable Vaccum Chuck Spin Coater with Optional Heating Cover
- 产品型号:VTC-200
- 产品展商:Shenyang Kejing Auto-Instrument Co., LTD
- 产品文档:无相关文档
- 发布时间:2018-09-12
- 在线询价
简单介绍
VTC-200 Programmable Vaccum Chuck Spin Coater with Optional Heating Cover is mainly applied to the formation of film in the laboratory of college and university.
VTC-200 Programmable Vaccum Chuck Spin Coater with Optional Heating Cover uses high speed rotation to make the colloid, solution and other materials with larger viscosity on the sample surface.
产品描述
Product introduction: VTC-200 is CE certified compact spin coater with vacuum chucks designed for easy and quick coating via sol-gel for wafers up to 8" diameter or 5" x 5" square. The spinning speed is variable from 500-6000 rpm with two programmable segments.The package comes included with complete accessories for immediate use. The heatable cover is optional , which allow drying sample after coating.The machine is small in size and saves laboratory space. It is easy to operate and suitable for beginners.Therefore, the machine is widely used in the laboratories of universities, research institutes and enterprise units.
SPECIFICATIONS
Product Name
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Programmable Vacuum Chuck Spin Coater VTC-200
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Working Voltage and power
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1. AC 220V , 50 Hz ,200W
2. There is a built in power socket on the right side of the VTC-200 spin coater. It is used to supply power for the vacuum pump. The output voltage of this power supply depends on the input voltage of the spin coater's main circuit.
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Motor
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24V DC motor .
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Structure
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1. Aluminum casting case to keep spinning stable
2. Drainage outlet and vacuum pump connector are on back panel
3. One filter is included in standard package. It is used to connect the pump and coater for preventing waste water flowing into the pump
4. One oilless pump is included in the standard package.
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Chamber & Vacuum Chuck
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1. Chamber diameter is 250 mm, and can accept wafer 8" Dia max. or 5"x5" square
2. Spinning chamber is made of PP which is corrosive resistant
3. One 6" vacuum chuck and chuck o-ring are included for holding 6" and 8" wafers
4. 1 piece of Adhesive tape (6'' W x 24'' L) is optional for coating irregularly shaped substrates or wafer with size < 6". Place the irregularly shaped substrate on the adhesive tape, then the vacuum chuck will hold the tape by suction
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Vacuum Pump
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One 120L/min Oilless Vacuum Pump is included.
Vacuum grade rubber pipe is included for immediate use.
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Spin Speed & Time
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1. Digital control panel with two programmable segments of different spin times and speeds
2. 500 - 6000 RPM adjustable spinning speed for each segment
3. Spinnning Time: 1 - 60s for each segment
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Liquid Injecting
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1. 20mL syringe is used to contain the coating material
2. The syringe holder height can be adjusted and rotated freely along the support rod.
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Product Dimensions
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350mm(L) x 500mm(D) x 400mm(H)
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Net Weight
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30 kg (67 lbs)
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Compliance
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CE Certified
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Warranty
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1. One year limited with lifetime support
2. Rusting and damage due to improper storage condition or maintenance are not covered by warranty
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Application Notes
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1. Do NOT use two stage, molecular vacuum pumps due to low vacuum design and oil evaporation.
2. In order to achieve optimal coating quality, please consider cleaning substrates by a plasma cleaner prior to coating. This will significantly reduce the surface tension on the substrates.
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Warnings
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1. Do not overflush the water bowl/base with any kinds of liquid. Excess liquid will leak into the motor shaft and cause damage. Please use fabric cloth to wipe out the residues remain in the bow/base.
2. If necessary, turn on the water outlet when flushing the water bowl/base to avoid liquid overflowing during the operation.
3. For more details about the cleaning procedure, please review the cleaning instruction for the spin coaters.
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Shipping Dimensions
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45"(L) x 30"(W) x 30"(H)
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Shipping Weight
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46 kg (100 lbs)
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