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- 产品名称：GSL-1100X-PJF-A Atmos Plasma Beam with Automatic Scanning System for Surface
- 产品型号：GSL-1100X-PJF-A
- 产品展商：Shenyang Kejing Auto-Instrument Co., LTD
- 产品文档：无相关文档
- 发布时间：2018-09-11
- 在线询价
简单介绍
GSL-1100X-PJF-A Atmos Plasma Beam with Automatic Scanning System for Surface is a compact atmosphere plasma surface treatment jet system, mainly consist of RF generator and plasma beam head.
GSL-1100X-PJF-A Atmos Plasma Beam with Automatic Scanning System for Surface is in the low temperature and no vacuum condition whose jet plasma beam can be fast to active and clean surface of the materials
产品描述
Product introduction:GSL1100X-PJF-A combines atmospheric plasma beam together with two dimensions automatic working stage, which allows plasma beam to scan sample surface according to program setting and surface coating or treatment consistent and uniform. The system consists of RF generator, flexible gas delivery pipe, plasma beam head, the X-Y working stage with vacuum chuck sample holder and programmable control box. The plasma beam can activate and clean material surface rapidly at low temperature without vacuum, such as single crystal wafer, optical component, plastics etc.
SPECIFICATIONS
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Product Name
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Atmospheric Plasma Beam Surface Treatment Instrument GSL1100X-PJF-A
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Main Features
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1、High speed surface treatment with simple and safe operation
2、Neither vacuum nor chamber required with versatile plasma chemistry
3、Small and practical, low cost.
4、Light weight and compact size.
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Technical Parameters
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1. Input Voltage:110/220V 50Hz/60Hz
2. Power: < 1000W
3. RF Generator Output Frequency: 20-23 kHz
4. Plasma Beam Head: Two plasma beam heads are included: Round head: 10-12mm; Rectangular head: 15-18mm
5. Input Gas Pressure:0.275MPa（min）
6. Working Gases:Air, N2, Ar, He or any mixed gas (no flammable and explosive gases)
7. Plasma Working Pressure:0.048MPa-0.068MPa
8. Working Environmental:Temperature: < 42°C; Humidity: ≤ 40℃RH
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Sample Stage & Controller
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1. X-Y two dimension are driven by step motors ,Z axis is adjustable by manual
2. X-axis travel: 200mm
3. Y-axis travel:100mm
4. Z-axis travel:50mm
5. Vacuum chunk :Ø100mm
6. Control box has LCD display and scanning program can be set by function key
7. One Ø100mm vacuum chunk is installed on X-Y sample holder, which can soak thin wafer up to Ø150mm on the sample holder firmly
8. One vacuum pump is needed to connect the vacuum chunk
9. The whole system is placed on a heavy-duty mobile cart
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Dimensions & Net Weight
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1. Dimensions:
2. Net weight: 55 kg
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Warranty & Certificate
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One year limited warranty with lifetime support
CE certified
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