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- 产品名称：GSL-1100X-SPC-16C Sputtering Evaporate Carbon Instrument
- 产品型号：GSL-1100X-SPC-16C
- 产品展商：Shenyang Kejing Auto-Instrument Co., LTD
- 产品文档：无相关文档
- 发布时间：2018-08-08
- 在线询价
简单介绍
GSL-1100X-SPC-16C Sputtering Evaporate Carbon Instrument is a CE certified machine, can be used for plasma sputtering coating film and evaporate carbon coating film.
GSL-1100X-SPC-16C Sputtering Evaporate Carbon Instrument is suitable for manufacturing scanning electron microscope（SEM）sample in the laboratory, also can make the non-conductor material testing electrode.
产品描述
Product introduction: GSL-1100X-SPC-16C is a two in one compact coating unit with Double Step Rotary Vane Vacuum Pump, which integrates plasma sputtering and evaporating into one small machine. It is specially designed for preparing SEM and EDX sample for microstructure and micro-area composition analysis in material analysis at low cost. to coat various materials, including carbon.The machine is small in size and saves laboratory space. It is easy to operate and suitable for beginners.Therefore, the machine is widely used in the laboratories of universities, research institutes and enterprise units.
SPECIFICATIONS
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Product Name
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GSL-1100X-SPC-16C Plasma Sputter and Carbon Evaporating
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Input Voltage
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208 - 240 VAC, single phase, 50/60 Hz
110V version is available with a 1500W transformer.
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Power
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< 2000W (including pump)
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Output Power
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1. Plasma Sputtering: 1600VDC and 50mA max.
2. Limit setting time：9999s
3. Evaporation: 10VAC and Max. Current 20A (for tungsten wire baskets).
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Working chamber
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Quartz glass tube, 160 mm Dia. x 110mm Height
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Coating Head
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1. Two coating heads are included:
2. DC sputtering head (2" target) ( Pic. 1 )
3. Thermal evaporation via tungsten wire baskets ( Pic. 2)
Pic.1  Pic. 2 
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Sample stage
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One 50 mm Dia. sample stage,
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Accessories
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Vacuum degree：4×10-1mbar-2×10-2mbar
1. One 4L Double Step Rotary Vane Vacuum Pump (external) with Pirani gauge and Vapor trap eliminates the oil mist are included , which can reach vacuum up to 10-2 torr
2. One solenoid valve is included for automatic air bleed.
3. For better carbon evaporation, suggest use molecular pump as picture below right at extra cost, which can reach vacuum up to 10-5 torr
 
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Gas atmosphere
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One needle valve installed to allow Ar gas inlet to achieve better plasma coating
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Target & Evaporating source
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1. One Au target: 50 mm Dia. x 0.12 mm.
2. Optional Targets are available ( If you need please contact us )
3. One 3 ft carbon fiber (yarn) is included for carbon evaporation ( can not use carbon rod for carbon coating )
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Overall dimension
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L400mm x W310mm x H390mm
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Net Weight
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50 kg
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Compliance
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CE approval
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Warranty
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One year limited with lifetime support
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Knowledge of Sputter Coating
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The system requires an Ar gas tank with pressure regulator which is not included
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