GSL-1100X-SPC-16 Single Target Plasma Sputtering Coater

Product Name

GSL-1100X-SPC-16  Single Target Plasma Sputtering Coater

Assembled Condition

The equipment is required under the altitude of 1000m, the temperature is 25 and 15 C, and the humidity is 55%Rh + 10%Rh.

1. Water: no need

2. Electricity: AC220V 50Hz, must have good grounding

3. Gas: the chamber of the equipment should be filled with argon (more than 99.99% purity), and the self-contained argon gas cylinder (with the pressure relief valve) should be prepared.

4. Workbench: size 600mm × 600mm × 700mm, bearing more than 50kg

5. Ventilator: no need

Main feature

1. With a vacuum meter and a sputtering ammeter, the working state can be monitored in real time.

2. By adjusting the sputtering current controller, the miniature vacuum valve can control the vacuum chamber pressure, the ionization current and select the required ionization gas to achieve the best coating effect.

3. The rubber sealing ring of the bell rim is specially designed to ensure that the phenomenon of glass clocks avalanches can be avoided for a long time.

4. The ceramic seal high pressure electrode joint is more durable than the usual rubber seal.

5. According to the characteristics of the gas ionization in the electric field, a large capacity sputtering vacuum chamber and the corresponding area of the sputtering target are used to make the sputtering coating more homogeneous and pure.

6. It has been certified by CE.

Technical parameter

1. Power: 220V

2. Total power: <2000W (including vacuum pump)

3. Vacuum chamber: φ160mm × 120mm

4. Sample table: 50mm, and highly adjustable, and can be coated with 8 SEM samples at the same time

5. The maximum uniform coating: φ45mm

Speicification

Size: 400mm × 300mm × 400mm; weight: 30kg

Standard accessory

1

gold target

1个

2

Intake valve

1个

3

fuse

2个

Optional accessory

Various targets, such as gold, indium, silver, platinum, etc.

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