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  • 入驻时间:2012-06-05
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GSL-1800X-ZF4 Plasma Sputtering+Evaporating+Carbon Coater with Turbo Hi-Vacuum

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  • 产品名称:GSL-1800X-ZF4 Plasma Sputtering+Evaporating+Carbon Coater with Turbo Hi-Vacuum
  • 产品型号:GSL-1800X-ZF4
  • 产品展商:Shenyang Kejing Auto-Instrument Co., LTD
  • 产品文档:无相关文档
  • 发布时间:2017-08-24
  • 在线询价
简单介绍
GSL-1800X-ZF4 Plasma Sputtering+Evaporating+Carbon Coater with Turbo Hi-Vacuum owns high degree vaccum. GSL-1800X-ZF4 Plasma Sputtering+Evaporating+Carbon Coater with Turbo Hi-Vacuum can fit metal film with sensitive for oxide,such as Ti,Al and Au. GSL-1800X-ZF4 Plasma Sputtering+Evaporating+Carbon Coater with owns four evaporation chambers to meet research of light emitting & organic solar cell
产品描述

Product introductionGSL-1800X-ZF4 is a ultra-vacuum evaporation coater designed for coating oxygen sensitive metallic materials, such as Ti, Al,Au and Ir etc, also for small molecule organic matter. It also can be used for coating all kinds of materials.It has four evaporation heater sources,each heater can be independently evaporated,there is a rotatable baffle above the heated boat, the baffle blocks the other three tungsten boats when one of the evaporation heater source is vaporized to avoid mutual contamination between vapor deposition materials.Evaporative coating of organic materials can also be achieved by changing part of the configurations, it can meets the research requirements of light-emitting devices and organic solar cells.It is an excellent and cost-effective coating machine for research labs.

SPECIFICATIONS

Product Name

Ultra-High Vacuum Thermal Evaporation Coater GSL-1800X-ZF4

Main Features

1. The Control Unit is integrated into the vacuum chamber

2. The independent evaporation current controller is convenient and quick to operate.

3. The vacuum chamber is equipped with a KF40 bypass valve (right connected to the front mechanical pump to improve efficiency), a CF150 gate valve (right connected to the molecular pump), a KF16 flange (installation resistance gauge), 5 CF35 flanges (1 installed ionization gauge, 4 spares for easy installation of other equipment).

4. There are 5 water-cooled electrodes at the bottom of the chamber to support 4 evaporation heating boats.

 

5. The sample stage is installed on top of the chamber.

6. One High-Resolution Film Thickness Monitor and Controller is optional ,the accuracy of thickness control is 1.0A

7. You may use recirculating chiller to save water.

Input/Output Voltage and Power

1. Input voltage:AC220V50Hz/60Hz

2. Power:<2.16KW( Not include pump)

3. Output:  AC 0-8V adjustable  and 200A Max.  Evaporation power<1.6KW Max.

Vacuum Chamber

 

1. Stainless steel chamber: Ø300mmID. ×400mm Height, Sand-blasting electrolytic polishing surface  

  

2. Φ100mm observation window in front of chamber

3. Hinged type door for easy sample loading

4. Manually operated shutters are on top of each evaporation W boat, which allow evaporating 4 kinds of material one by one

Vacuum Pump 

1. High-speed turbo vacuum pump is included and connected to the vacuum chamber.

2. Vacuum speed:  600L/S

3. Vacuum level: 5.6×10-4Pa  ( after 40 minutes pumping )

4. Limit vacuum:   5.2×10-5Pa  ( after baking at 100 -150°C)

5. Leaking rate:   6.7×10-9Pa·L/S

6. Vacuum port:  140 mm diameterHeating temperature is room temperature -500

Evaporation Source 
Sample Holder

 

1. Four tungsten heating boats are included supported by water cold electrodes

2. Tungsten heating boat has dimension 100mm L × 10 mm W ×0.3 mm H. Spare W boat is available at extra cost.

3. On top of three boats has a big automatic shutter 

4. Built in automatic shutter allows evaporation source can be used without contamination

5. 100 mm diameter rotating sample holder is on top of the chamber with diameter 260mm, which can be heated up to 500°C max. via digital temperature controller with ±1 °C accuracy

6. The distance between evaporation source and sample holder is 260 mm.

Control Unit

1. Vacuum, thickness and power control are integrated into one control box

2. The Control Unit is integrated into the vacuum chamber for easy moving

Overall Dimensions

L650mm× W1200mm× H1600mm

Net Weight

600 kg

Facility Requirement  for Installation

1. Space: 250 SF with height > 6 feet

2. Power: 220V AC, single phase with Max 10KW ( 50A breaker)

3. Water: > 15L/minute flowing water required for electrode cooling.You may order recirculating water chiller to save water.

Warranty & Certificate

1. Two years limited warranty with lifetime support

2. CE certified

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