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  • 入驻时间:2012-06-05
  • 联系人:康冉德
  • 电话:024-23826163-811
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TM-106 Film thickness monitor

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  • 产品名称:TM-106 Film thickness monitor
  • 产品型号:TM-106
  • 产品展商:Shenyang Kejing Auto-Instrument Co., LTD
  • 产品文档:无相关文档
  • 发布时间:2017-08-25
  • 在线询价
简单介绍
TM-106 Film thickness monitor adopted Quartz crystal oscillation principle. TM-106 Film thickness monitor is mainly used in MBE, OLED thermal evaporation, magnetron sputtering and other equipment for the preparation of thin films. TM-106 Film thickness monitor is according to the real-time rate, PWM analog output can be output to be used as a film thickness.
产品描述


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Main

feature


1, this machine can be connected to the computer.

2, the display instrument has the advantages of simple interface, intuitionistic, reasonable, convenient and quick operation, and can directly display the thickness, rate, frequency, PWM of the measured film.

The working state of controlling the percentage of output.

3, the door control time, output mode, rate algorithm, material parameter, output range and communication parameter can be set by software or display device, and

The measured data can be written to the Excel file.

4, it has the advantages of small size, high measurement precision, simple operation and easy to use.


Technical

Parameter


EQ-TM106-1 monitoring component

1, power supply: DC 5V (+ +), maximum current 400mA

2, frequency resolution: + 0.03Hz

3, the film thickness resolution: 0.0136 a (AL)

4, the accuracy of the film thickness is + 0.5%, depending on the process conditions, especially the position of the sensor, the material stress, temperature and density.

5, measurement speed: 100ms-1s/ times, can be set

6 measuring range: 500000 a (AL)

7, standard sensor crystal: 6MHz

8, computer interface: RS-232/485 serial interface (baud rate 12002400480096 can be set,

Data bit: 8, stop bit: 1, check: no)

9, analog output: 8 bit resolution, PWM pulse width modulation output (Collector opening or internal 5V output)

10, working environment: temperature 0-50 C, humidity 5%-85%RH, no condensation water beads

11, the shape size: 90mm x 50mm x 18mm



EQ-TM106-2 display instrument

1, input power supply: ac 220V ±10%

2, output power: DC 5V3A

3, display: 12 × 2 digital tube and LED

4, communication port: RS-485 (baud rate 1200C 2400N 4800N 9600N 19200C 38400 can be set up, data bit: 8 bits. Stop bit: 1 bit, parity check: none)

5, size: 182mm × 65mm × 160mm



EQ-TM106-3 probe

1, application of chip frequency: 6MHz

2, suitable chip size: O 14mm

3, install flange: CF35

4, cooling water pipe: 3mm, length 300mm, 500mm, 1000mm

5, cooling water pressure: <0.3MPa

6, pneumatic baffle tube: O 3mm

7, compressed air pressure: <0.8MPa, >0.5MPa

8, baking temperature: water state <200 C, water state flange <100 C

9, electrical interface: BCN socket


Standard

accessory

1

EQ-TM106-1 monitoring component

1

2

EQ-TM106-2 display instrument

1

3

EQ-TM106-3 probe

1

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