EQ-TM106-1 monitoring component
1, power supply: DC 5V (+ +), maximum current 400mA
2, frequency resolution: + 0.03Hz
3, the film thickness resolution: 0.0136 a (AL)
4, the accuracy of the film thickness is + 0.5%, depending on the process conditions, especially the position of the sensor, the material stress, temperature and density.
5, measurement speed: 100ms-1s/ times, can be set
6 measuring range: 500000 a (AL)
7, standard sensor crystal: 6MHz
8, computer interface: RS-232/485 serial interface (baud rate 12002400480096 can be set,
Data bit: 8, stop bit: 1, check: no)
9, analog output: 8 bit resolution, PWM pulse width modulation output (Collector opening or internal 5V output)
10, working environment: temperature 0-50 C, humidity 5%-85%RH, no condensation water beads
11, the shape size: 90mm x 50mm x 18mm
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