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- 产品名称：UNIPOL-1203 Chemical Mechanical Lapping / Polishing Machine
- 产品型号：UNIPOL-1203
- 产品展商：Shenyang Kejing Auto-Instrument Co., LTD
- 产品文档：无相关文档
- 发布时间：2020-04-14
- 在线询价
简单介绍
UNIPOL-1203 Chemical Mechanical Lapping Polishing Machine, It is suitable for CMP flattening and smoothing technology, the whole machine grinding part is made by anti-corrosion material, chemical corrosion resistance.
产品描述
Introduction：UNIPOL-1203 Chemical Mechanical Lapping / Polishing Machine, It is suitable for CMP flattening and smoothing technology, the whole machine grinding part is made by anti-corrosion material, chemical corrosion resistance, equipped with automatic slurry feeder and precise grinding and polishing control instrument, fully automatic touch screen panel, from the processing performance and speed to achieve the needs of wafer processing.
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Description：
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UNIPOL-1203 Chemical Mechanical Lapping / Polishing Machine
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Installation conditions:
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The equipment is required to be used at an altitude below 1000m, temperature 25℃±15℃, humidity 55%Rh±10%Rh
1、Water：The equipment is equipped with water inlet and outlet, which shall be connected to tap water and drainage
2、Power supply：AC220V 50Hz,must have good grounding
3、Air supply：No need
4、Worktable：Dimension: 800mm×600mm×700mm，Loading weight beyond 200kg
5、Ventilation device：No need
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Main
feature:
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1. Ultra-flat stainless steel polishing plate (planeness is less than 0.0025mm per 25mm×25mm).
2. Superfine rotation shaft (pallet end jump less than 0.01mm).
3. There are two work stations, which can be controlled respectively.
4. Equipped with fully automatic control touch screen panel, spindle speed, swing speed and grinding time can be set.
5. Equipped with automatic slurry feeder, visual adjustment of flow rate, automatic grinding and polishing.
6. Equipped with GPC-100A precise grinding and polishing control instrument, which can adjust the pressure and fix the surface, making grinding and throwing more convenient and quick.
7. The grinding part is made of anticorrosive materials and resistant to chemical corrosion.
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Technical
Parameter：
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Main machine
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GPC-100A precise grinding and polishing control instrument
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Slurry feeder
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1.Power supply: 110V/220V 400W
2.Grinding plate speed：1-240rpm
3.Work station ：2pcs
4.Work station adjustable speed：1-15
5.Precision Rotating Shaft：0.008/250mm
6.Grinding plate：Ø300mm
7. Conditioning ring：Ø127.5mm
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1.Dia.Sample holder：Ø103mm
2.Maximum travel distance：12mm
3.Digital Micrometer accuracy：0.001mm
4.Loading weight：0.1kg-2.1kg
5.Pressure Indicator measuring range：1g-5000g
6.Sample holding mode：Vacuum
7.Sample holding size：Dia≤103mm、T.≤12mm
8.尺寸：O.D.146mm，H 266mm
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SKZD-2 Slurry Feeder
1.Volume：1.5L
2.Water flow ：0-35ml/min
3.Dimension：170×290×350mm；Weight：3kg
SKZD-4 Automatic Slurry Feeder
1.Supply pump：4pcs
2.Water tank：600ml/bottle
3.Time：1-999min
4.Water flow：0.1ml/min-10ml/min
5.Dimension：230×370×450mm；Weight：10kg
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Specification：
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Overall dimension：950mm×690mm×580mm；Weight：90kg
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Standard
Accessory：
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1
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Stainless steel polishing plate
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1set
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2
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Sample holder
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1pcs
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3
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Conditioning ring
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1pcs
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4
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SKZD-2 Slurry Feeder
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1set
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5
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SKZD-4 Automatic Slurry Feeder
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1set
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6
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GPC-100A precise grinding and polishing control instrument
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1set
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7
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Polishing pad（Synthetic Leather,Poromeric,Polyamide Foam）
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Each 1pcs
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8
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Al2O3 grinding powder
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0.5kg
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9
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Wax bar
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4pcs
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Optional
accessory
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1.YJXZ-12 Mixing circulating pump
2.Precise grinding and polishing control instrument
3.Ceramic grinding plate
4.Glass grinding plate
5.Magnetic resin diamond grinding disc
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