Table 1:Cleanroom HVAC requirements
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(Recommended to meet and exceed Federal Standard209E,209Class 1VLF,and ISO 14644-1)
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ISO14644-1
Percubic meter
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209E
Intern. (SI)
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209E English(USA)
per cubic ft.
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Suggested minimum ceiling coverage
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Suggested
filter type
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Suggested minimum
airvelocity
@ceiling level
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Suggested minimum cleanroom
airchanges
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Class3
Particle counts
≥0.1µm-1,000
≥0.5µm-35
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Class M
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Class1
Particle counts
≥0.1µm-35
≥0.5µm-1
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100%ceining coverage
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ULPA filters providing efficiency of 99.99995% at0.12µm
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75to 90 fpm (0.38to0.46m/sec)
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500to 640 ach
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Class M 1.5
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Class1
Particle counts
≥0.1µm-35
≥0.5µm-1
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100%ceining coverage
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ULPA filters providing efficiency of 99.99995% at0.12µm
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75to 90 fpm (0.38to0.46m/sec)
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450to 640 ach
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Class M 2
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Class 10
Particle counts
≥0.1µm-99.1
≥0.5µm-2.83
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100%ceining coverage
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ULPA filters providing efficiency of 99.99995% at0.12µm
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70to 80 fpm (0.36to0.41m/sec)
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420to 600 ach
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Class4
Particle counts
≥0.1µm-10,000
≥0.5µm-352
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Class M 2.5
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Class 10
Particle counts
≥0.1µm-345
≥0.5µm-10
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100%ceining coverage
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ULPA filters providing efficiency of 99.99995% at0.12µm
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75to 90 fpm (0.36to0.41m/sec)
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420to 600 ach
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Class M 3
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Class 100
Particle counts
≥0.1µm-991
≥0.5µm-28.3
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80%ceining coverage
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HEPA filters providing efficiency of 99.99995% at0.12µm
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50to 70 fpm (0.26to0.36m/sec)
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300to 480 ach
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Class5
Particle counts
≥0.1µm-100,000
≥0.5µm-3520
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Class M 3.5
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Class 100
Particle counts
≥0.1µm-3,450
≥0.5µm-100
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75%ceining coverage
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HEPA filters providing efficiency of 99.99995% at0.12µm
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50to 70 fpm (0.26to0.36m/sec)
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300to480 ach
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