Aeronex Purifier (氣體純化器)
Non-Reactive - O2, N2O, SF6 , NF3 , NO, Air
Hydrogen - H2 and H2 / inert gas blends
Hydride - NH3, SiH4, GeH4, AsH3, PH3, B2H6 and hydride carrier gas blends
Corrosive - Cl2, HCl, SiCl4, SiH2Cl2, BCl3, HF, F2, SiF4, & HBr
Atmospheric - Clean Dry Air, CO2, liquid CO2 and supercritical CO2
Optics – Clean Dry Air, Inerts, O2, O2/Inert Mixtures, Lens Purge Gases
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