Non-Reactive -
O2, N2O, SF6 , NF3 , NO, Air

Hydrogen -
H2 and H2 / inert gas blends

Hydride -
NH3, SiH4, GeH4, AsH3, PH3, B2H6 and hydride carrier gas blends

Corrosive -
Cl2, HCl, SiCl4, SiH2Cl2, BCl3, HF, F2, SiF4, & HBr

Atmospheric -
Clean Dry Air, CO2, liquid CO2 and supercritical CO2

Optics –
Clean Dry Air, Inerts, O2, O2/Inert Mixtures, Lens Purge Gases