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RTP快速升溫管式爐1000℃

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產品名稱: RTP快速升溫管式爐1000℃
產品型號: OTF-1200X-4-RTP
產品展商: MTI
產品價格: 0.00 元

簡單介紹
爐管尺寸: 110 外徑 x 103內徑 x 381 長 樣品支架及滑軌法蘭, which is made 支架托盤采用氮化鋁制成. 控溫精度± 5℃ 氮化鋁支架托盤*大可放置 3"樣品 氮化鋁具有非常好的導熱性,它能及時顯示在樣品平臺中樣品的*佳真實的溫度誤差 密封系統由不銹鋼法蘭、精密針閥及硅膠O型圈構成. 滑軌式法蘭,放取樣品更加方便

RTP快速升溫管式爐1000℃ 的詳細介紹


Specifications:

爐體結構

Double layer steel case with mullite liner without water cooling or air cooling

加熱元件

8 根碘鎢燈管 (D=10 L=300 T =200, mm)

加熱區

加熱區12" 、恒溫區 4"、恒溫精度±5℃

爐管 &樣品支架

  • 爐管尺寸: 110 外徑 x 103內徑 x 381 長
  • 樣品支架及滑軌法蘭, which is made 支架托盤采用氮化鋁制成.
    • 控溫精度± 5℃
       
    • 氮化鋁支架托盤*大可放置 3"樣品
    • 氮化鋁具有非常好的導熱性,它能及時顯示在樣品平臺中樣品的*佳真實的溫度誤差

密封系統

  • 密封系統由不銹鋼法蘭、精密針閥及硅膠O型圈構成.
  • 滑軌式法蘭,放取樣品更加方便

水冷機構

  • 使用過程中必須通水冷卻.
  • 請確認冷卻水流量≥3L/min,水溫<20℃,水壓> 25 PSI
  • 建議采用水冷循環裝置 以節約用水 (請點擊查看).
  • 警告:此RTP爐的*大持有時間不得少于600秒,1000℃〜1100℃,否則O形圈可能會融化

Flow-meter

One flow meter is installed on the front panel to adjust gas flow from 0 - 160 ml/min

Vacuum gauge

Digital vacuum gauge with a measurement range from 1 mtorr~800 torr is installed with the furnace.

Vacuum pressure & Gas Fitting 

  • Pressure can reach 50 mtorr by using mechanical vacuum pump with KF25 adapter.
  • Pressure can reach 10-4 torr by molecular pump with KF25 adapter.
           
  • In order to increase the throughput and achieve high vacuum, you may replace the standard barbed hose fitting with the KF25 adapter, please click underline to order.
  • For supplying high pressure gas, you may replace the standard barbed hose fitting with the VCR Face Seal Fitting, please click underline to order.

Temperature control

PID automatic control via SCR (Silicon Controlled Rectifier) power control, e.g. current limiting phase angle fired the resistor.

Thermal Couple

S type, the head of the thermocouple touches the Aluminum Nitride sample holder from underneath 

Programmable Temperature controller

  • Built in protection from overheated and broken thermal couple
  • 30 programmablesegments
  • Auto tune function
  • Temperature control accuracy: +/- 1ºC
  • Built in RS485 port for PC control
  • Software is included. (Computer is not included)
  • One 15" screen laptop with operation software installed is available as option at $900 extra cost.         
  • Click here to download the driver and software

Max. Heating Rate

50ºC/sec recommended, and 120ºC/sec. for short time 


1000ºC heating profile

800°C heating profile

700°C heating profile

600°C heating profile

Max. Cooling Rate

64ºC/min (Under vacuum: 200 mtorr), 117ºC/min (Under atmosphere pressure) 

Working Temperature

1100ºC Max. 

Power Input

208-240 AC, 50/60 Hz single phase, 9 KW Max. (> 60A breaker required) 

Dimension

760 X 330 X 530 mm (30"W x 13"L x 21" H)
 

Net weight

45 kg (100 lbs)
 
Warranty
One year limited warranty for electrical parts. (Consumable parts such as processing tubes, o-rings and halogen lamp are not covered by the warranty, please order the replacement at related products below.)
Certificate
  CE certified
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