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● 适用于半导体的生产和科研领域，读 数误差+/-3%
● 采用液晶背光显示，可对正反向功率 及驻波比等进行三位半数字显示
● 功率测试范围可人工或自动设置，并有 GPIB和RS-232接口供选择
功率范围: 100mW-10kW
频率范围: 100kHz-2.5GHz
驻波比范围: 1.0-199.9
读数误差: ±3%
功能: 测量正反向功率，通过W和dBm显示:测量驻波比及回波损耗，通过dB显示; 以及测量大小值 显示: 三位半液晶背光显示
工作电源: AC和电池两种，115/230AC，50/60Hz或8节1.2V镍镉电池
尺寸: 312X309X108mm
接口选项: IEEE-488接口或RS-232接口
BIRD(鸟牌)4421功率计
Precision Power Meter for Semiconductor Processing Applications
• ±1% Accuracy - Accomplished through the use of sensors with an
automatic frequency compensation scheme, where the error contributions
due to directional coupler frequency response characteristics are
eliminated.
• Wide Dynamic Range - The instrument will meet the full accuracy
specification over a 35 dB dynamic range.
• Excellent Measurement Repeatability - Typically <0.1%
• Digital Display - Along with automatic VSWR calculation
• Computer Interface - RS-232 and IEEE-488 standard
The Bird® Model 4421 is a precision RF power meter that, while
originally intended for general purpose laboratory applications where
high accuracy is required, has found wide acceptance in semiconductor
processing applications. The product is configured as a system,
consisting of the Model 4421 digital display and a precision power
sensor selected for the application based upon maximum power
and operating frequency.
MODEL 4421 MULTIFUNCTION POWER METER
Power Range: 100 mW to 25 kW FS
Frequency Range : 100 kHz - 1 GHz
VSWR Range: 1.0 - 199.9
Functions : Forward and reflected power in W or dBm, VSWR,
return loss in dB and min./max. values
Overrange : Audible warning when RF power input exceeds
120% of sensor's maximum power range
Indication Display: 3 1/2 digit-liquid crystal display with indicator
for mode, measurement units, battery condition,
programming status, and trend arrows.
Switchable backlight.
Operating Power : 115/230 VAC, 50/60 Hz or 8 nickel metal hydride
1.2 V cells (NEDA type 10014)
Nominal Size : 12 9/32" L x 12 5/32" W x 4 1/4" H
(312 mm x 309 mm x 108 mm)
with handle extended 15 7/16" L (392 mm)
Weight : 11 lbs. (5 kg.)
Interconnects: 1 meter latch-n-lock coiled cable
Interfaces: IEEE-488 and RS-232 standard
Dimensions : 4 1/2" x 6 1/2" (114 x 165 mm)
Required Product: RF Power Sensor
Accessories: Case 4300A215 (page 43)
19” Panel Mount Kit 4421-250
Latch & Lock Case 4421-038
4020 SERIES — Power Sensor
|
4020 系列功率传感器 |
||
|
Model(型号) |
Frequency Range(频率范围) |
Power Input(功率范围) |
|
4021 |
1.8-32 MHz |
300 mW to 1 kW (1.2 kW max.) |
|
4022 |
25-1000 MHz |
300 mW to 1 kW (1.2 kW max.) |
|
4024 |
1.5-32 MHz |
3 W to 10 kW (12 kW max.) |
|
4025 |
100-2500 kHz |
3 W to 10 kW (12 kW max.) |
|
4027A 系列功率传感器 |
||
|
Model(型号) |
Frequency Range(频率范围) |
Power Input(功率范围) |
|
4027A250K |
250-400 kHz |
3 W to 10 kW |
|
4027A400K |
400-550 kHz |
3 W to 10 kW |
|
4027A800K |
800-950 kHz |
3 W to 10 kW |
|
4027A2M |
1.5-2.5 MHz |
3 W to 10 kW |
|
4027A4M |
3-5 MHz |
3 W to 10 kW |
|
4027A10M |
10-15 MHz |
3 W to 10 kW |
|
4027A12M |
10-15 MHz |
300 mW to 1kW |
|
4027A25M |
25-30 MHz |
3 W to 9 kW |
|
4027A35M |
35-45 MHz |
3 W to 7.5 kW |
|
4027A60M |
45-65 MHz |
3 W to 6 kW |
|
4027A100M |
95-105 MHz |
3 W to 4 kW |
|
4027A150M |
150-170 MHz |
3.75 W to 3.75 kW |
|
4027F 系列过滤型传感器 |
||
|
Model(型号) |
Frequency Range(频率范围) |
Power Input(功率范围) |
|
4027F2M |
1.8-2.2 MHz |
100 W to 10 kW |
|
4027F10M |
12-15 MHz |
100 W to 10 kW |
