Onda Corporation  HCT MCT-1010  MCT 1020 系列清洁槽水听器 使用水下听音器来测定超音波清洗能力

尽管超声波和兆声波被广泛运用于清洗中，但声波学特性并没有得到很好的理解。HCT水听器与MCT声波仪为此提供了可靠的解决方案来评定和测量超声波和兆声波清洗的声学特性，其独特的单点感应设计，让具有高空间分辨率的测量提供了清洗槽的真实三维的清洗映射，坚固的结构可用于定期的声压量测，并确认清洗桶槽的清洗效率。

应用

取得声波映射图象来优化超声波和兆声波的清洗效率

定期抽查清洗槽的声场以对制程控制测控

比较桶槽对桶槽的性能，以保持生产环境的匹配

通过确定不同的化学物质，载荷条件，和电源设置的音波效果来制定和调整制程配方

确定清洗槽的问题，如传感器脱落或故障衰减

通过直接将探头连接示波器来收集低频声波信息

Onda Corporation  HCT MCT-1010 

Onda Corporation  HCT MCT 1020

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Onda Corporation AIMS

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Onda Corporation HNR-1000

Onda Corporation ASTS-01

HCT-series Cleaning Tank Hydrophone

A hydrophone to characterize ultrasonic cleaners

Despite the wide adoption of ultrasonic and megasonic cleaning, the acoustic characteristics are not well understood.  The HCT hydrophone with MCT acoustic meter bridges this gap, offering a reliable solution to characterize and monitor the acoustic properties of ultrasonic and megasonic cleaners.   Its unique single point sensing design allows measurements with high spatial resolution to offer true 3-dimensional mapping of the cleaning tank.  The rugged construction allows routine mapping of the acoustic pressure and ultimately determination of the cleaning efficiency of the tank.   

Applications

• Acquire acoustic maps to optimize cleaning efficiency of ultrasonic and megasonic baths
• Routinely spot check acoustic field of cleaning tank for process control monitoring
• Compare tank-to-tank performance to maintain matching in production environments
• Develop and tune process recipes by determining the acoustic effects of varying chemistries, loading conditions, and power settings.
• Identify cleaning tank issues such as debonded or malfunctioning transducers
• Collect lower level acoustic information by connecting probe directly to an oscilloscope

Acoustic Pressure Plot of a 970kHz Semiconductor 200mm Single Wafer Cleaner indicating near field and standing wave effects