日本YAMATO低温等离子灰化机 PR300

日本YAMATO低温等离子灰化机[产品打印页面]

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产品名称：日本YAMATO低温等离子灰化机
产品型号：PR300/301 Low
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简单介绍

日本YAMATO低温等离子灰化机 PR300/301 本产品是用等离子来进行表面处理的专业装置。桌台式，具有高性能，力求操作简便，快捷，可显示数据。广泛应用于以电子材料为中心的各个行业中。用途:用于CSP、BGA、COB、基板的等离子处理。消除有机膜，金属氧化膜。用于印刷电路板的干式清洗。界面活性处理。

产品描述

日本YAMATO低温等离子灰化机 PR300/301

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Model
300	301
Method
Barrel type of DP DP : direct plasma
High-frequency Output
Max.300W
Oscillating Frequency
13.56MHz
Reaction Chamber
ø64×160mm 3 chambers	ø118×160mm 1 chamber

The PR 300 is a gas plasma device that is used widely for such applications as production of semiconductors and analysis work.（PR300型等离子灰化机是一种广泛应用于半导体分析工作上的气体等离子装置。） It boasts outstanding operability and safety,（有着十分突出的可操作性和**性） with an automatic tuning system as a standard component and other features. It has a compact design（小型化设计）, with a small-size HF generator and an oscillation section integrated with a portion of the chamber,（配有小型高频发生器和振荡部件的综合性工作室） allowing it to be installed into a 19-inch rack.（允许放置19英寸支架）

Three 64mm diameter chambers are included. (PR300)
The unit can be set for a wide range of output conditions to handle a variety of testing samples.
One 118mm diameter large chamber is accommodated.

The gas plasma equipment has a wide range of applications from ashing, etching, dry cleaning, etc.

Operation Flowchart

Piping System Diagram (PR300)

Specifications

Model	PR300	PR301
Method	Barrel type of direct plasma
Control part
High frequency output	300W variable (100W×3 chambers)
Oscillating frequency	13.56 MHz
Output impedance	50Ω
Tuning method	Manual biaxial tuning method
Instrument	Output watt meter (0 to 300W) Reflected wave watt meter (0 to 100W) Vacuum gauge, bourdon's tube type Flow meter, needle valve integrated type, 1 set
Timer	0.1sec. to 999h
Gas inlet	1/4" stainless steel
Power source (50/60Hz)	AC 100/220V, single phase, 1 kVA
Reaction part
Reaction chamber	Made of super hard glass, ø64×160mm×3 chanbers	Made of pyrex glass, ø118×160mm
Electrode structure	Condenser type, 2-way split
Control system	Auto pressure reduction, auto leak valve
Piping material	Stailess steel, Teflon, Copper and Brass	Stainless steel, Teflon
External dimensions(W×D×Hmm)	438×520×556	438×520×656
Weight	Approx. 38kg	Approx. kg
Standard Accessories
	Vacuum grease :1 container O-ring for reaction chamber :6 pcs. Sample dish (large and small) :each 4sets Lid for reaction chamber :4 sets Adapter for ground :1 pc.
Optional Accessories
Sample dish (large) Sample dish (small) Sample shelf Stand

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日本YAMATO低温等离子灰化机[产品打印页面]