INFICON 溅射传感器专为各种溅射过程而设计。镀金铍铜传感器体和冷却管在溅射环境中可实现*佳冷却效果。传感器头内置的磁铁可抑制因外部磁场偏转溅射系统中的高能自由电子而引起的过热。后装式晶体支架设计便于更换晶体,更换时无需从系统中拆卸传感器头。
镀金铍铜传感器体和冷却管可实现*佳冷却效果
磁铁可偏转自由电子,使其远离监控器晶体
利用可弯曲的水管轻松安装,灵活放置传感器
后装式晶体插入便于更换晶体
2 pass water with coax connector
2¾ in. ConFlat® Flange – IPN 002-043
1 in. Bolt – IPN 002-042
1) Customer to provide vacuum-tight braze joints or connectors for the water tubes.
2) XIU or Oscillator designed to interface with the specific deposition controller.