日本YAMATO等离子清洗机[产品打印页面]

型号

V1000

V1000X

V1000XS

等离子工作模式

RIE and DP

RIE : 物理冲击型
DP : 化学反应型

高频、高周波输出功率

1000W

1000W/1500W

振荡频率

13.56 MHz

平台尺寸(mm)

280×280

300×300

400×375

型号

V-1000

V-1000X（双工作台）

V-1000XS

等离子工作模式

RIE and DP

主件

电极结构

平行平板式

平台尺寸

280mmW×280mmD

300mmW×300mmD(Double stage)

400mmW×375mmD

工作室尺寸

400mmW×400mmD×380mmH

400mmW×400mmD×380mmH

600mmW×554mmD×440mmH

真空测量

电容压力计

反应气体系统

双系统

控制器

Programmable controller

显示屏

Programmable terminal (touch panel)

射频能量供应

输入

AC 200/220/380V,Three phase,

高频输出功率

1,000W

1,000 & 1,500W

发振器

水晶发振

发振频率

13.56 MHz

匹配调节

自动调整

真空泵 (Vacuum Pump)

Displacement （置换量）

670 & 1,000 liters/min.

670 & 1,500 liters/min.

1,000 & 1,500 liters/min.

Inlet configuration(进口配置)

NW40 with a flexible stainless steel hose (1 meter long)

Outlet configuration（出口配置）

NW40

气体系统（Gas Systems）

Purge gas（净化气体）

Nitrogen (N2) and a regulator (3 kgf/cm2) with a manometer

Driving gas（推进气体）

Air or nitrogen (N2) and a regulator (alarm contact at 10 kgf/cm2) with a manometer

Reaction gas G1（反应气体1）

Oxygen (O2) and a mass flow controller (1000 secm)

Reaction gas G2（反应气体2）

Argon (Ar) and a mass flow controller (100 secm)

Safety Mechanisms（**机构）

System Protections（系统保护）

*Oscillator protection circuit *Front-door interlock switch (interlocked with the startup)
*Safety switches (interlock switch on the side panels) *Vacuum leak test function
*Air-purge end buzzer *Alarm buzzer *Emergency stop push-button switch

Actions against a trouble of the vacuum pump（真空泵故障反应）

The plasma scrubber takes the counteractions listed below and show an Alarm message on its display when something wrong happens on the vacuum pump.
*The main valve closes *The gas feed valve closes *The isolation valve closes
*The oscillator stops outputting *Treatment process is suspended *The Alarm buzzer starts sounding
* The alarm indicator lamp lights up to notify the trouble of the vacuum pump
*The treatment process timer stops

REQUIRED UTILITIES（必要的配套设施）

Power Supply（电源供应）

Main unit with vacuum pump

（配真空泵主机）

Three phases, AC220V, 30 A, 60Hz (with an accessory power cable of 3 meters long, and exposed crimp-style terminals of 8 millimeters long)

Gases（气体）

Driving gas （推进气体）

Air or nitrogen (N2) (Feed pressure: 5～7 kgf/cm2)

Purge gas（净化气体）

Nitrogen (N2) (Feed pressure: 2～7 kgf/cm2)

Reaction gas G1（反应气体1）

Oxygen (O2) (Feed pressure: 1.5 kgf/cm2)

Reaction gas G2（反应气体2）

Argon (Ar) (Feed pressure: 1.5 kgf/cm2)

Connection port（连接端口）

1/4" swagelok joint bulkhead union (SS-400-61)

Note: Pressure regulators, filters and other protective devices shall be prepared by others.

Connection Diameter of the Discharge Duct (and inlet Port)（ 流注输送管口径）

Vacuum pump's inlet port

NW4O (with a flexible stainless steel hose of 1 meter long)

Vacuum pump's outlet port

NW4O

Main unit's ozone outlet port

163mm diameter

Oscillator's ventilation port

163mm diameter

Note: Every port has a connector designed for a flexible hose. Connect a duct to these inlet and outlet ports.